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EE8091 - Micro Electro Mechanical Systems Syllabus (Elective IV) Regulation 2017 Anna University

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Anna University, Code – EE8091, this article about B.E/B.Tech./B.Arch Mechanical Engineering Semester VIII Micro Electro Mechanical Systems (Elective IV) Syllabus. Students are requested to make notes or PDFs of the semester in Micro Electro Mechanical Systems Syllabus for effective preparation from here. It will help you to understand what are the topics in the syllabus of Micro Electro Mechanical Systems.

And to make preparation strategies to score well in the examinations. Unit-wise detailed syllabus is given below in one place, in the following article EE8091 – Micro Electro Mechanical Systems. If the information helps you, kindly share it with your classmates.

If you want to know more about the syllabus of B.E Mechanical Engineering connected to an affiliated institution’s four-year undergraduate degree programme. We provide you with a detailed Year-wise, semester-wise, and Subject-wise syllabus in the following link B.E Mechanical Engineering Syllabus Anna University Regulation 2017.

Aim Of Concept:

  • To provide knowledge of semiconductors and solid mechanics to fabricate MEMS devices.
  • To educate on the rudiments of Micro fabrication techniques.
  • To introduce various sensors and actuators To introduce different materials used for MEMS.
  • To educate on the applications of MEMS to disciplines beyond Electrical and Mechanical engineering.

EE8091 – Micro Electro Mechanical Systems Syllabus (Elective IV)

Unit I: Introduction

Intrinsic Characteristics of MEMS – Energy Domains and Transducers- Sensors and Actuators – Introduction to Micro fabrication – Silicon based MEMS processes – New Materials – Review of Electrical and Mechanical concepts in MEMS – Semiconductor devices – Stress and strain analysis
– Flexural beam bending- Torsional deflection.

Unit II: Sensors And Actuators-I

Electrostatic sensors – Parallel plate capacitors – Applications – Interdigitated Finger capacitor – Comb drive devices – Micro Grippers – Micro Motors – Thermal Sensing and Actuation – Thermal expansion – Thermal couples – Thermal resistors – Thermal Bimorph – Applications – Magnetic Actuators – Micromagnetic components – Case studies of MEMS in magnetic actuators- Actuation using Shape Memory Alloys.

Unit III: Sensors And Actuators-II

Piezoresistive sensors – Piezoresistive sensor materials – Stress analysis of mechanical elements – Applications to Inertia, Pressure, Tactile and Flow sensors – Piezoelectric sensors and actuators – piezoelectric effects – piezoelectric materials – Applications to Inertia , Acoustic, Tactile and Flow sensors.

Unit IV: Micromachining

Silicon Anisotropic Etching – Anisotrophic Wet Etching – Dry Etching of Silicon – Plasma Etching – Deep Reaction Ion Etching (DRIE) – Isotropic Wet Etching – Gas Phase Etchants – Case studies – Basic surface micro machining processes – Structural and Sacrificial Materials – Acceleration of sacrificial Etch – Striction and Antistriction methods – LIGA Process – Assembly of 3D MEMS – Foundry process.

Unit V: Polymer And Optical Mems

Polymers in MEMS – Polimide – SU – 8 – Liquid Crystal Polymer (LCP) – PDMS – PMMA – Parylene – Fluorocarbon – Application to Acceleration, Pressure, Flow and Tactile sensors – Optical MEMS – Lenses and Mirrors – Actuators for Active Optical MEMS.

Text Books:

  1. Chang Liu, “Foundations of MEMS”, Pearson Education Inc., 2006.
  2. Stephen D Senturia, “Microsystem Design”, Springer Publication, 2000.
  3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2002.

References:

  1. James J.Allen, “Micro Electro Mechanical System Design”, CRC Press Publisher, 2010
  2. Julian w. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, “Micro Sensors MEMS and Smart Devices”, John Wiley & Son LTD,2002
  3. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000
  4. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House, 2000.
  5. Thomas M.Adams and Richard A.Layton, “Introduction MEMS, Fabrication and Application,” Springer 2012.

If you want to check the syllabus of other branches provided by Anna University, Anna University syllabus Regulation 2017 will assist you in a clear path. Hope you find the required details.

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